Feature Products

NANO-38 Thermal Evaporation System

Our new NANO-38 deposition system is a compact, low cost evaporator able to facilitate sequential depositions. Its simple, full enclosure design is based on the success of our PVD-75 system and includes an integrated touch-screen controller.

Deposition Techniques

• Thermal evaporation (up to 3 sources for sequential depositions)

Common Features

• 18" high x 12" deep/wide D-shape 304 stainless steel chamber
• Aluminum door with rectangular viewport
• 3-pocket thermal evaporator with standard 2 kW power supply
• Fixed substrate fixture (platen)
• Turbomolecular pumping
• Integrated touch-screen controller and film monitor
• Fully enclosed "zero" clean room footprint design

Options

• Thin film controller
• Motorized rotating substrate fixture
• Pneumatic deposition shutters