Vacuum Flanges |
Vacuum Flanges, Fittings, and Components
We manufacture a comprehensive range of flanges and flanged components such as nipples (spools), elbows, tees, crosses, flex bellows, glass-metal seals, quick couplings, viewports, etc. in all standard vacuum flange systems for rough, HV, and UHV applications. |
Flanges & Hardware
We manufacture all popular sizes and styles of ConFlat (CF), ISO, KF (QF), and wire-seal flanges and flanged components. Numerous adapter flanges and reducer components are available to mate different flange systems, different flange sizes, or flanges to fittings. Additionally, we offer a comprehensive selection of flange hardware, including: copper gaskets, o-rings, clamps, centering rings, and bolt/nut sets.
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Tubing & Bellows
We manufacture stainless steel tubing and flexible stainless steel bellows for vacuum component alignment and Swagelok fitting process lines for semiconductor applications. Additionally, we offer rubber, Teflon, and PVC tubing in various diameters for foreline pump connection or rough pumping applications.
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Viewports
Viewports are windows installed on a vacuum chamber to transmit electromagnetic radiation from UV, through visible, to infrared. We offer KF, ISO and CF flanged viewports in a variety of glass materials and coatings, including: quartz, Kodial, sapphire, and other exotic materials. Additionally, we offer manual and pneumatically actuated viewport shutters to protect viewports during deposition.
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Glass-Metal Adapters
Glass to metal adapters use a graded glass seal to join a metal tube to a glass tube. We offer tubulated, domed, and flanged adapters constructed of either stainless steel or Kovar joined to a variety of glass materials, including: 7740 Pyrex, 7052 glass, and quartz.
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Fittings
We offer a variety of fittings, couplings, and flanged adapter fittings for vacuum utility applications such as water service, process gas lines, and gauge tube installation. Available fitting terminations include: Swagelok, VCR, VCO, NPT, quick connect couplings, baseplate ports, test ports, and hose tubulations.
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